Fabrication of close-spaced MEMS devices by method of precise adhesion regulation

Vardosanidze L., Taliashvili Z., Tavkhelidze A., Cox R. T. (2007) Fabrication of close-spaced MEMS devices by method of precise adhesion regulation. US patent 7,208,021.

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Abstract

In one aspect, the present invention provides a method for fabricating two layers separated by a gap comprising the steps of: (a) providing a first material; (b) treating the first material to reduce the number of available bonding centers; (c) placing a second material over the first material and allowing bonds to form between the two materials to form a composite; and (d) separating the composite so formed along the boundary of the two materials. In a further aspect, subsequent layers of material may be introduced to the composite by repeating steps (b) and (c) under conditions where adhesion between the subsequent layers is greater, smaller or substantially the same as the adhesion between the first and second material.

Item Type:	Patent
Subjects:	T Technology > T Technology (General)
Divisions:	Faculties/Schools > School of Natural Sciences and Engineering
Depositing User:	Professor Avtandil Tavkhelidze
Date Deposited:	08 May 2014 09:26
Last Modified:	02 Apr 2015 07:47
URI:	http://eprints.iliauni.edu.ge/id/eprint/1438

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