Electroplating of Conformal Electrodes for Vacuum Nanogap Tunnel Junction

1397 16 5618 2 15647 document 5618 J. Electrochem. Soc.-2012-Jangidze-D413-7.pdf application/pdf 127ffaa429b01bfe863f237565bad11e MD5 594150 2014-05-03 07:27:38 http://eprints.iliauni.edu.ge/1397/1/J.%20Electrochem.%20Soc.-2012-Jangidze-D413-7.pdf 1397 1 1 application/pdf text en validuser

J. Electrochem. Soc.-2012-Jangidze-D413-7.pdf

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http://eprints.org/relation/isVersionOf http://eprints.iliauni.edu.ge/id/document/8256 http://eprints.org/relation/isVolatileVersionOf http://eprints.iliauni.edu.ge/id/document/8256 http://eprints.org/relation/issmallThumbnailVersionOf http://eprints.iliauni.edu.ge/id/document/8256 archive 15 disk0/00/00/13/97 2014-05-05 12:53:24 2015-04-02 08:30:03 2014-05-05 12:53:24 article show avtandil.tavkhelidze@iliauni.edu.ge Jangidze L. Tavkhelidze A. avtandil.tavkhelidze@iliauni.edu.ge Blagidze Y. Taliashvili Z. Electroplating of Conformal Electrodes for Vacuum Nanogap Tunnel Junction pub T1 fac_eng restricted In this study, we electroplate Cu electrode on Si substrate to realize a large-area vacuum nanogap for electron tunneling. We used cathode coating, cathode rotation, asymmetric current regime, and electrolyte temperature stabilization to obtain the regular geometry of the Cu electrode and reduce its internal tension. Subsequently, internal tension was altered to achieve the predefined surface curvature (concave or convex). For 12-mm diameter Ag/Cu electrode, we achieve the curvature of 40 nm/mm from the Ag side. Reduction of the electrode diameter to 3 mm allowed curvature as low as of 2.5 nm/mm. It also allowed fabrication of two conformal electrodes having a nanogap of less than 5 nm wide, over the area of 7 mm^2. Such electrodes can be used for efficient energy conversion and cooling in the mixed thermionic and thermotunneling regime. 2012 published J. Electrochem. Soc. 159 7 The Electrochemical Society D413-D417 TRUE http://jes.ecsdl.org/content/159/7/D413.abstract?sid=9460d133-a5fd-4b68-9ba3-036344051740